Home

Our Company

Agnitron Technology, Inc. is a compound semiconductor technology company and supports MOCVD equipment related needs of R&D and production users. We strive to deliver products and services to enable development of advanced semiconductor material and device technologies and products which improve quality of life and the environment.

Learn More About Agnitron

Control Software and Automation

MOCVD

Insitu Monitoring

LATEST NEWS

MOCVD

A Series

Agilis A series equipment can be configured to grow various III-V As/P alloy-based material systems. Tools are installed worldwide growing AlGaAs/InGaAlP alloys, as well as world class Ga2O3 wide-bandgap materials.

Learn More

Agilis 100

Customizable compact MOCVD designed to meet your R&D requirements. Can grow suited for various AlN, AlGaN, GaN, InGaN, MgZnO, ZnO, III-IV compounds, TMD [MoS2, MoSe2, WS2, WSe], 2D BN, Phosphorene, SiC, and ß-Ga2O3.

Learn More

Agilis 500

Efficiency meets compact in this record-breaking R&D MOCVD design. Can grow suited for various AlN, AlGaN, GaN, InGaN, III-V As/P alloys, MgZnO, ZnO, III-IV compounds, TMD [MoS2, MoSe2, WS2, WSe], ALD, Phosphorene, SiC, and ß-Ga2O3.

Learn More

Agilis 700

Best Ga2O3 MOCVD ever designed. Can grow suited for various AlN, AlGaN, GaN, InGaN, III-V As/P alloys, MgZnO, ZnO, III-IV compounds, TMD [MoS2, MoSe2, WS2, WSe], ALD, Phosphorene, SiC, and ß-Ga2O3.

Learn More
GAOX300

GOX Series 300

Agilis A series equipment can be configured to grow various III-V As/P alloy-based material systems. Tools are installed worldwide growing AlGaAs/InGaAlP alloys, as well as world class Ga2O3 wide-bandgap materials.

Learn More
Refurbished MOCVD in Chanhassen

Custom Systems

Agnitron has been working with government laboratories (AFRL & ONR) on advancing GaN growth processes for power device technology. Agnitron is currently building an advanced equipment system capable of activating the p-type GaN material for a wafer of at least 4″ in diameter for making ultra-high power vertical power electronic switches.

Learn More
Advanced Process Control Software in Eden Prairie

Control Software and Automation

Imperium-MOCVD™ Control Software and Automation is a modern Windows operating system based SCADA package for controlling MOCVD equipment and processes. It was developed for extending the life of Legacy MOCVD systems and upgrading these large capital investments with state of art control and data logging capabilities. Imperium-MOCVD™ is a direct replacement for Legacy Emcore, Veeco, Thomas Swan, Aixtron and Structured Material Inc. (SMI) OEM Control Software and Automation and offers many new features setting a new bar for MOCVD control flexibility.

Learn More

Insitu Monitoring

The Agnitron AgniTemp Multiwavelength Pyrometer. Combines speed and precision, enabling accurate, repeatable measurement and control in demanding MOCVD applications. The high-speed performance is ideal for processes with high susceptor rotation speeds. The AgniTemp unit is remarkably compact and supports multiple simultaneous wavelength measurement. The emissivity corrected pyrometer measures and controls wafer surface temperatures for repeatable, accurate and precise growth process. It provides increased yields due to excellent wafer-to-wafer and run-to-run temperature repeatability and control, eliminates process drift, provides quick turn-around after maintenance, and ensures tools higher uptime.

Learn More

Have Questions?

Do you still have questions about Agnitron’s MOVCD systems, control software and automation, insitu monitoring or parts and services? We can help!

Contact Us
Go to Top