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LATEST NEWS
Agnitron’s CEO, Andrei Osinsky to present recent advances in MOCVD grown β-Ga2O3 films at E-MRS September 18-21, 2023, in Warsaw Poland.
Dr. Osinsky’s presentation is titled, “Advances in MOCVD of β-Ga2O3 epitaxial film growth, in-situ etch, and regrowth.” The talk will review results achieved in recent [...]
Agnitron Technology and Arizona State University Ga2O3 etching accomplishments highlighted in latest issue of Compound Semiconductor Magazine
Controllable etching of Ga2O3 has been featured in Compound Semiconductor Magazine this month. Ga2O3, an important and increasingly studied ultra- wide bandgap material for next [...]
Agnitron Technology installs two additional MOCVD systems for university customers!
Agnitron Technology, of Chanhassen, Minnesota, USA, the leader in custom MOCVD systems in the USA, has successfully installed two custom MOCVD systems this summer. The [...]
MOCVD
GOX Series 300
Agilis GOX series equipment can be configured to grow Gallium Oxide and AlGaO alloy-based material systems. Agnitron tools are installed on 4 continents growing world-class wide bandgap material for power devices for numerous labs. Record breading Ga2O3 wide-bandgap materials has been achieved on the Agilis GOX series tools.
Control Software and Automation
Imperium-MOCVD™ Control Software and Automation is a modern Windows operating system based SCADA package for controlling MOCVD equipment and processes. It was developed for extending the life of Legacy MOCVD systems and upgrading these large capital investments with state of art control and data logging capabilities. Imperium-MOCVD™ is a direct replacement for Legacy Emcore, Veeco, Thomas Swan, Aixtron and Structured Material Inc. (SMI) OEM Control Software and Automation and offers many new features setting a new bar for MOCVD control flexibility.
Insitu Monitoring
The Agnitron AgniTemp Multiwavelength Pyrometer. Combines speed and precision, enabling accurate, repeatable measurement and control in demanding MOCVD applications. The high-speed performance is ideal for processes with high susceptor rotation speeds. The AgniTemp unit is remarkably compact and supports multiple simultaneous wavelength measurement. The emissivity corrected pyrometer measures and controls wafer surface temperatures for repeatable, accurate and precise growth process. It provides increased yields due to excellent wafer-to-wafer and run-to-run temperature repeatability and control, eliminates process drift, provides quick turn-around after maintenance, and ensures tools higher uptime.