Agilis A Series 300/455

Automation meets repeatability.

MOCVD in Edina

Agilis A series equipment can be configured to grow various III-V As/P alloy-based material systems. Tools are installed worldwide growing AlGaAs/InGaAlP alloys, as well as world class Ga2O3 wide-bandgap materials.

The Agilis technology is based on the highly developed Rotating Disc Reactor (RDR) vertical growth chamber pioneered by several of the principles of Agnitron. The Agilis RDR by design can accommodate a wide variety of wafer sizes and configurations which vary based on customer requirements.

A305: Supporting a 305mm wafer carrier with multiple wafer configuration options.

A455: Supporting a 445mm wafer carrier with multiple wafer configuration options.

Please inquire if specific custom reactor / wafer count size needed.

Ideal for the growth of HEMTs, LDs, Photo detectors, LEDs, or Power electronic devices. The RDR enhanced with the Agilis technology is ideal for any device which requires rapid switching between layers (MWQs, Bragg reflectors) and precise temperature control (e.g., InGaN or InGaAsP) relying on the industries most advanced ECP. (Emissivity Compensated Pyrometry)
Agnitron A Series system provides repeatability and reproducibility to the highest industry; Uniformity of deposition thickness, doping distribution, alloy composition, all with minimal particle count. The unique feature of the Agilis RDR is that control the flow dynamics represses recirculation leaving the areas above the wafer clean and free of deposition; further through material science and design engineering coatings in the chamber anywhere are less apt to find its way to the wafer surface.
Specification customization to customer preferences has been a key to our success. It is to be accommodated whenever possible.
Up to 16 metal organic sources available based on customer specification and configuration
Up to 10 different hydride source channel configurations.
Typical system to include transfer chamber with robotic arm, loading chamber, and closed-loop purification glovebox workstation.
Source channels offered with regular, diluted, or double diluted network configurations.
Fast switching separate vent / run injection manifolds for group III, V, and dopant precursors.
Automatically pressure balanced vent / run lines with industry leading rapid switching software control
Compact design provides for minimal dead space, reliable processing and requires minimal maintenance.
All system delivered come with either basic or more extensive material demonstrations which are mutually agreed upon Agnitron and the customer.
The tool meets all SEMI industry and metal organic chemical safety requirements. Safety is priority. Toxic gas detection (in the load lock chamber and elsewhere as requested/required) and combustible gas detection are provided on the tool and integrated into the control system. Additional channels may be added outside or within the system cabinetry per customer preferences.
In-situ control capabilities is one of Agnitron’s trademark features. Of course, full data capture capability is displayed real-time and stored for all control elements of the tool. The data logging files are stored in a SQL database for extraction by various process control tools or customers individual data processing requirements. In addition to onboard flow and pressure control, Agnitron has developed a sophisticate, robust ECP (emissivity compensated pyrometer-single and dual wavelength versions) to provide unparalleled in-situ temperature control particularly for highly sensitive GaN and AsP based alloy material systems. Additionally, to the reflectivity control provided the AgniTemp® ECP is completely digital and is fully integrated into the Imperium® control system for precise temperature control.
The Agilis deploys and acoustical based binary gas monitoring system also fully integrated into Imperium® to give customers full confidence in the flux of precursors reaching the surface of the wafer.

One of the driving attributes is the Agilis ability to utilize the RDR and control the contributing factors to suppress recirculation to a minimum. The process engineers use a tool developed to help design recipes which accounts for the inverse relationship of the boundary layer to pressure and use rotation speed and carrier gas flow to increase interface abruptness and reduce particle generation. Rotation speeds vary based on growth conditions, but the tool can reach 1500 RPM.

Agilis A series utilizers restive heating capable of temperatures up to 900 °C

Agilis A series uses a multi-zone approach with each zone actively controlled with an ECP for full control to within +/- 0.5C.

System is capable of loading and unloading multiple wafer carriers using a state-of-the-art semiconductor industry leading robotic arm

Dwell stations for loading and unloading of platters

Up to 4x wafer carriers can be loaded into the system at any given time for efficient steady state campaign operations

*Include video of robotic arm*

To avoid wafers, wafer carriers, or the load lock/growth chamber being exposed to air(moisture) Agilis features closed-loop purification glovebox workstations for controlled environment.
Glovebox controls integrated with automated electronic control system.

Please see parts / services tab in Agnitron’s website.
Agnitron sells custom wafer carrier designs that can be optimally designed to meet customer specifications.
*Present examples of all unique / standard A300/455 wafer carriers* Yes show them with sample ¼ wafer coupons as well

Precision control and awareness of system performance are critical to advanced processing:

Agnitron supplied MOCVD systems are integrated with Imperium® Process Control Software and Automation and Beckhoff Automation PLC hardware. This combination represents a robust architecture with tremendous flexibility to support your process wherever your data leads with digital device communication enhancing recipe editing and data analysis.

Combine the power of advanced metrology and Imperium® for precision monitoring and control:

Imperium® Control Packages can be seamlessly integrated with a variety of in-situ metrology tools such as reflectometry and Emissivity Compensated Pyrometry (ECP) from all leading suppliers for monitoring and / or feedback control operation. Of course, Agnitron’s own leading ECP (AgniTemp®) is available to all customers as well. To increase temperature stability and process reproducibility Imperium® is offered with closed-loop feedback control of temperature during recipe execution using either emissivity corrected, or non-emissivity corrected pyrometers.

Safety is paramount and reliability is key:

System includes hazardous gas detection and safety alarms. The Imperium Control Software and Automation and Beckhoff PLC architecture offers a streamlined Windows OS based control environment and supports all industry standard analog and digital device and drive communication protocols. The Beckhoff proprietary TwinCat3 environment offers a software-based PLC function to ensure maximum control system stability. Even to the extent that if window’s environment “blue screens” during recipe execution of the system, the process will continue to run autonomously unaffected and complete the run safely
Using latest industry automation control communication for gas panel devices (MFCs / PCUs).

All purchased Agilis A Series MOCVD systems include the following standard factory and field support services to help customers quickly start materials study and keep equipment operating:

  • Operation and maintenance training at the newly built Agnitron facility in Chanhassen, MN
  • Pre-shipment qualification and checkout with N2 and H2 carrier gases throughout the system
  • Documentation and remote support for facility requirements/construction/preparation
  • System installation, startup, and growth demonstration at the customer site
  • Standard bronze system warranty (upgradeable per request)

On-going parts and field services support. This is helped Agnitron maintains a seasoned staff of mechanical engineers and technicians as well as Chemical Engineer trained process engineers. The Agnitron team has more than a century of experience in the principals alone. Agnitron provides a long-term approach to its spares and service business, and we can accommodate a variety of arrangements to be sure our customers are sufficiently supported remotely and on-site.

One of the best ways to keep any MOCVD tool at peak production is through preventive maintenance. Agnitron supports these services worldwide as well.

Have Questions?

Do you still have questions about Agnitron’s MOVCD systems, control software and automation, insitu monitoring or parts and services? We can help!