R&D MOCVD

Agnitron has a research and development MOCVD/CVD laboratory which supports the development of new MOCVD critical components. Using the laboratory Agnitron is also able to provide services for the growth of custom epitaxial structures based on Ga2O3, GaN, and related alloys for power electronic devices and UV photodetector.

Agilis 100

Customizable compact MOCVD designed to meet your R&D requirements. Can grow suited for various AlN, AlGaN, GaN, InGaN, MgZnO, ZnO, III-IV compounds, TMD [MoS2, MoSe2, WS2, WSe], 2D BN, Phosphorene, SiC, and ß-Ga2O3.

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Agilis 500

Efficiency meets compact in this record-breaking R&D MOCVD design. Can grow suited for various AlN, AlGaN, GaN, InGaN, III-V As/P alloys, MgZnO, ZnO, III-IV compounds, TMD [MoS2, MoSe2, WS2, WSe], ALD, Phosphorene, SiC, and ß-Ga2O3.

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Agilis 700

Best Ga2O3 MOCVD ever designed. Can grow suited for various AlN, AlGaN, GaN, InGaN, III-V As/P alloys, MgZnO, ZnO, III-IV compounds, TMD [MoS2, MoSe2, WS2, WSe], ALD, Phosphorene, SiC, and ß-Ga2O3.

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A Series

Agilis A series equipment can be configured to grow various III-V As/P alloy-based material systems. Tools are installed worldwide growing AlGaAs/InGaAlP alloys, as well as world class Ga2O3 wide-bandgap materials.

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Refurbished MOCVD in Chanhassen

GOX Series 300

Agilis A series equipment can be configured to grow various III-V As/P alloy-based material systems. Tools are installed worldwide growing AlGaAs/InGaAlP alloys, as well as world class Ga2O3 wide-bandgap materials.

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Refurbished MOCVD in Chanhassen

Custom Systems

Agnitron has been working with the military (AFRL & ONR) on advancing GaN growth processes for power device technology. Agnitron is currently building an advanced equipment system capable of activating the p-type GaN material for a wafer of at least 4″ in diameter for making ultra-high power vertical power electronic switches.

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Have Questions?

Do you still have questions about Agnitron’s MOVCD systems, control software and automation, insitu monitoring or parts and services? We can help!

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