Agnitron successfully upgraded a legacy Aixtron 200/4 dual chamber MOCVD at the University of Eindhoven located in the Netherlands. On top of our standard Beckhoff Automation programmable logic controller (PLC) and software upgrade, the tender requirements included an upgrade to the safety system, control devices (MFCs and pressure controllers), heating power supplies and PID controllers. An additional level of complexity was that the system had two reactors. Our engineers completed the project within 15 working days.
The Imperium platform is a Windows 10 based package and is used for controlling MOCVD and other semiconductor process equipment. Imperium-MOCVD™ is a direct Control Software and Automation replacement for Emcore, Veeco and Thomas Swan and other MOCVD systems and it offers the latest in control technology; setting a new bar for MOCVD control flexibility. The Imperium-MOCVD™ Control Software and Automation upgrades offer the latest in control technology and solves support issues which threaten up time for many users of proven but unsupported MOCVD systems with obsolete control hardware and software. It was developed in response to demand for upgrading legacy MOCVD tools for state of the art processing and extends the life of proven MOCVD platforms no longer supported by the OEM. Visit our Gen 3 Imperium-MOCVD™ Control Software and Automation page to view current information, as we offer a brochure and data sheet for customer inspection. Contact us today to setup an online live Imperium demo.