Agnitron to attend the upcoming 65th Electronic Materials Conference (EMC) 2023 at University of California, Santa Barbara.

The upcoming 65th Electronic Materials Conference (EMC) will be held at the University of California, Santa Barbara, CA, June 28-30, with two contributed papers based on Agnitron’s work.


The first paper, entitled “Controllable doping of MOCVD Ga2O3 with Nitrogen using ammonia precursor.” will be presented by Dr. Fikadu Alema of Agnitron Technology. He will present on the use of NH3/N2 precursor for controllable doping of MOCVD Ga2O3 with nitrogen as a deep acceptor dopant to achieve compensated epitaxial layers for power devices. The work focuses on the incorporation efficiency, reproducibility, and controllability of N doping into Ga2O3 films by varying the molar flow rates of NH3/N2. Dr. Alema has been working on these material systems and has produced some of the world’s best gallium oxide films on record.


The second paper will be on a novel in situ etching of Ga2O3 by MOCVD, which is conducted in collaboration with Prof. Nidhin K. Kalarickal of Arizona State University. The paper’s title is “Demonstration of MOCVD based In-situ Ga etching of -Ga2O3 using TEGa,” and Mr. Abishek Katta from Prof. Kalarickal’s research group will present it. The work highlights MOCVD-based in-situ Ga2O3 etching and regrowth, which is crucial for Ga2O3 device fabrication.


Agnitron Technology’s headquarters, based in Chanhassen, MN, houses its extensive materials growth laboratory containing multiple MOCVD tools.  Agnitron produces tools for Oxides as well as other III/V and III/N material systems in its manufacturing facility adjacent to the Labs.  Its in-house tools are the same as ones supplied to customers worldwide, doing all manner of R&D on materials as well as 24/7 mass production of semiconductor devices.


Agnitron Technology, Inc. is a compound semiconductor technology company and supports MOCVD equipment related needs of R&D and production users. We strive to deliver products and services to enable development of advanced semiconductor material, device technologies, and products which improve quality of life and the environment.

For more information about Agnitron Technology and its groundbreaking work in the compound semiconductor industry, please visit the company’s website at

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