Agnitron joins the 2024 US Gallium Oxide Workshop in Columbus, OH
Agnitron Showcases Groundbreaking Research at GOX 2024
Columbus, OH — Agnitron Technology made a significant contribution at GOX 2024, the 7th U.S. Gallium Oxide Workshop held on the Ohio State University campus from August 5-7, 2024. The event brought together over 150 leading researchers and scientists to explore advancements in ultra-wide bandgap semiconductors, a key material for the next generation of RF and power devices.
Agnitron delivered two presentations and a poster at the poster session held the first evening of the workshop, solidifying its position as a leader in the field. The company, which holds the world record for the highest mobility Ga2O3 growth, continues to push the boundaries of what’s possible in its semiconductor research.
Presentations and Research Highlights
William Brand, a key figure in Agnitron’s research team, presented two papers and presided over a poster viewed on the workshop’s opening night. The first presentation, titled “Innovative Showerhead Technology for High-Quality MOCVD β-Ga2O3,” showcased the groundbreaking results achieved with Agnitron’s newly patented Closed Space Showerhead technology. This innovation, developed over a decade of research, offers significant improvements in growth rate and uniformity for Ga2O3 materials.
The second presentation, “Nitrogen Doping of Ga2O3 via MOCVD Using Nitric Oxide Precursor,” explored the effects of using a nitric oxide precursor to reduce hydrogen in Ga2O3 films, and also leading to noteworthy changes in the growth rate under standard operating conditions.
The poster session, titled “In-Situ MOCVD Etching of β-Ga2O3 by Tertiarybutylchloride (TBCl),” highlighted a novel approach to etching Ga2O3 materials during the device manufacturing process. This work demonstrates the versatility of MOCVD technology in the semiconductor manufacturing process.
Looking Forward
The GOX 2024 workshop continues to grow in importance as more groups work on this promising material system. Agnitron is excited to be at the forefront of this research and looks forward to participating in the 2025 workshop.
About Agnitron Technology, Inc.
Agnitron Technology, Inc. is a leading compound semiconductor technology company specializing in MOCVD equipment for both R&D and production environments. Their Agilis Series MOCVD systems support material growth for III-N, As/P, oxide, 2-D/TMD, and other related materials. The Agilis β-Ga2O3 configuration, available with single or multi-wafer loading capacities, is now offered to the general market. In addition to equipment, Agnitron provides contract III-N and oxide R&D services at their Chanhassen, MN laboratory.
For more information, visit www.agnitron.com or contact sales@agnitron.com.