Agnitron Supports Emcore/Veeco Legacy MOCVD Systems
Agnitron is supporting all Emcore/Veeco, Discovery (D75, D125, D180) and Enterprise (E300, E400, E450) series MOCVD systems, including spare and replacement parts for all system components, customization, software/hardware upgrades and service plans with varying levels of support. We have a large inventory of parts available for immediate shipment and non-stocked items are available upon request with minimal lead times.
Contact us today to learn more about the following parts:
- Heater assemblies
- Reactor chambers and internal components
- Gas delivery system and manifolds
- Particle Filters
- Ferrofluidic seal
- Analog and DeviceNet Flow/Pressure Controllers
- Baratrons
- Vacuum Pumps
- PLC components and modules
- Temperature Controllers
- RT Pyrometers
- Piezocon MO flow monitors
- GaAs flowflange screens
- Thermocouples
- All other MOCVD system components
All parts and services offered by Agnitron are certified and qualified by engineering team. We only offer high quality parts which are equivalent to the OEM specification.
In some cases when components are obsolete Agnitron can offer currently supported alternative including integration with the control system.
Please check our Control Software and Automation page too see how existing control system can be upgraded to up-to-date standards.
More Services
Growth R&D
Agnitron’s advanced proprietary technology enables cost effective starting substrates for GaN material research and development or device production. This technology utilizes novel techniques which mitigate obstacles that have hindered high quality material growth on readily available substrates that are commonly used in the semiconductor industry.
Refurbished MOCVD
Legacy MOCVD systems from Emcore, Veeco, Thomas Swan and Aixtron proved themselves as highly capable R&D platforms through the 2000’s. Though many of these aging systems are still operating despite limited or no OEM support, many components have become obsolete and require upgrades to extend the system’s productive lifetime.