The Agnitron Technology Molecular Beam Flux Monitor is ideal for R&D applications and provides effusion cell flux calibration for Molecular Beam Epitaxy (MBE) systems. In MBE applications the measurement of effusion cell beam equivalent pressures (BEP) enables relating flux ratios and growth rates which is important for process optimization and precise structure growth.

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  • Bayard Alpert Ionization Gauge
  • Full UHV compatible
  • Bakable to 250⁰C
  • 4.5” CF flange mount on reactor
  • Adaptable to any MBE system
  • Complete gauge isolation available with optional gate valve
  • Edge welded bellows and electrical feedthrough flange to deliver linear travel of the ionization gauge into the effusion cell flux beam
  • Ion gauge is fully retractable to prevent interference with growth process
  • Travel is customizable to suit specific system requirements

Process Benefits

  • Flux calibration of effusion cells as a function of temperature
  • Quick flux ratio check from sources prior to growth
  • Unparalleled precision growth structure and composition control

Data Collected with Agnitron’s Molecular Beam Flux Monitor

Above are examples of flux data collected using a Molecular Beam Flux Monitor. The data is not only useful for calibrating deposition rates as a function of source temperature but also for characterizing the stability of the source material. “After oxidation” curves were collected after several growths in the presence of oxygen plasma to grow oxide films.

Above are examples of flux data collected using a Molecular Beam Flux Monitor. The data is not only useful for calibrating deposition rates as a function of source temperature but also for characterizing the stability of the source material. “After oxidation” curves were collected after several growths in the presence of oxygen plasma to grow oxide films.


This figure is SIMS data collected from an oxide film with a linearly graded composition grown with the aid of a Molecular Beam Flux Monitor. The metal content is graded from 0% to 43% Mg.

This figure is SIMS data collected from an oxide film with a linearly graded composition grown with the aid of a Molecular Beam Flux Monitor. The metal content is graded from 0% to 43% Mg.

 

The Molecular Beam Flux Monitor can be used for placing various types of insitu monitoring sensors in MBE chambers for customized instrumentation capabilities. Please use the Contact Us page to inquire about more information for Agnitron Technology custom equipment solutions.

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