Configuration:

Configurable for 21 x 2″ or 8 x 3″ Throughput
M. Braun Pass-Through Glovebox
Sekidenko Pyrometer
Anest Iwata ISP-250B Scroll Vacuum Pump
Leybold Turbovac 361C Turbomolecular Pump
Ebara A70W Series Multi-stage Vacuum Pump
VAT Gatevalve
Granville-Phillips Ion Gauges
MKS Baratron
MKS Throttle Valve
MKS Pressure Controller
Yokogawa Temperature Controllers
Real Temp Pyrometers

Capable of depositing a wide variety of materials, including (but not limited to):
GaN, InGaN, AlGaN

Comments:

The systems is fully operational, refurbished and upgraded with new hardware and IMPERIUM–MOCVD™ Software. Inspection can be arranged. We provide installation, support and warranty.

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