Emcore D180 MOCVD system Configured for GaN process:
MO sources are: 2-TMAl, 2-TMGa, 2-Cp2Mg, 1-TEGa, 2-TMIn.

Hydride sources: NH3, H2, N2, Si2H6


The systems is fully operational, refurbished and upgraded with new hardware and IMPERIUM–MOCVD Software. Inspection can be arranged. We provide installation, support and warranty.

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Manufacturer: VEECO / EMCORE
Model No: D180 (GaN) MOCVD
Model Year: 2001
Equip Type: LED Wafer Fabrication
Category: Chemical Vapor Deposition (CVD)
Item ID: AGTI-D180GAN015
Quantity: Several
Condition: Good/Excellent
Status: Available
Serial No: Available upon request
Availability: Immediate
Price (USD): Please request quote
Location: Chanhassen, MN