System Information:
| Manufacturer: | EMCORE |
| Year Manufactured: | 2003 |
| Condition: | Ready for refurbishment |
| Status: | Available |
| Location: | Chanhassen, MN |
Equipment Configuration:
| Material Growth Configuration: | Gallium Nitride (GaN), III-N materials |
| Wafer Loading Capacity: | 3×2″ |
| Control System: | Imperium-MOCVDTM Controls |
Standard Upgrades:
- Complete system checkout and system returned to OEM operating specification
- OEM certified rebuild of all critical system components
- Professional cleaning of critical process components
- Replacement of obsolete and unsupported electronics and control system components
- Control system upgrade to Imperium-MOCVDTM Control Software
Available Optional Upgrades:
- High temperature heater assembly
- Insitu metrology from kSA, LayTec or Veeco with feedback control integrated with Imperium-MOCVDTM Control Software
- Fast switching manifold upgrades for ALD style injection and deposition capabilities
- Gas panel modifications for unique process capabilities
- Configuration modification of source dilution networks (regular, dilution, double dilution)
- Pressure balancing device upgrades for lower dead space volumes on gas panel
- Metal organic source flow monitoring by Piezocon or equivalent devices with automatic feedback control of flow during recipe execution
Pricing:
Call or email for pricing information:
procurement@agnitron.com; +1 952-937-7505.
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