Agnitron to Convert E300 GaN MOCVD System for As/P Growth

Agnitron Technology has confirmed an order for a refurbished and upgraded Veeco E300 MOCVD system from a production company in the United States. As part of the project, Agnitron will convert critical system components from the original III-N hardware configuration over to enable growth of As/P materials. Additionally, the gas panel will be manufactured new with the latest in gas delivery technology and the control system will be upgraded to our state of art Imperium-MOCVD™ Control Platform. The Imperium Control Software and Automation upgrade replaces all EpiView functionality, adds the latest features in MOCVD process control and data acquisition, and seamlessly integrates Genmark robot control directly into the user interface. SQL database architecture enables advanced data analysis capabilities for recipe management and process data archiving and analysis. The upgraded E300 system will enable production volume material epi-growth for the customer by means of an advanced but economical technical solution.

The Imperium platform is a Windows 7 based package and is used for controlling MOCVD and other semiconductor process equipment (Windows 10 compatible version available in 2016). Imperium-MOCVD™ is a direct Control Software and Automation replacement for Emcore, Veeco and Thomas Swan MOCVD systems and offers the latest in control technology, setting a new bar for MOCVD control flexibility. It was developed in response to demand for upgrading legacy MOCVD tools for state of the art processing and extends the life of proven MOCVD platforms no longer supported by the OEM. Visit our Gen 3 Imperium-MOCVD™ Control Software and Automation page to view current information, as we offer a brochure and data sheet for customer inspection. Contact us today to setup an online live Imperium demo.

We at Agnitron Technology, Inc. specialize in developing emerging compound semiconductor material and device technologies into commercial products as well as economical custom MOCVD equipment solutions. Our diverse team and partners draw from backgrounds in physics, materials science, semiconductor processing and electrical and mechanical engineering. Collectively, this team is credited with more than 400 published manuscripts and over 50 patents. Visit for more information.

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