Agnitron Receives Order for Custom Agilis R&D MOCVD System

IMG_6668lucisEffect (3)Agnitron Technology has confirmed an order for an Agnitron OEM design Agilis R&D MOCVD system. The order was placed by a major research university in the United States and offers a custom configuration with dual growth chambers with common load lock. This configuration provides tremendous flexibility  and efficiency enabling crystal growth of two different material sets within a single MOCVD system footprint. The research group will use the Agilis system for studying III-N and II-IV-N materials for a variety of applications including optoelectronic and thermoelectric devices.

The Agilis system will be configured with seven alkyl sources and five hydride gas channels with the ability to switch the alkyl carrier gas between nitrogen and hydrogen. Both growth chambers will be high-speed rotating disk reactors with single 2” wafer loading capacity and offer advanced R&D material growth capability with very low gas consumption. Agnitron’s Imperium-MOCVD™ control platform will be used for system control. In addition to the MOCVD system, Agnitron is supplying gas cabinets and an abatement system.

The Imperium platform is a Windows 7 (Windows 10 compatible version available in 2016) based package and is used for controlling MOCVD and other semiconductor process equipment as an OEM control system or as a field upgrade. Imperium-MOCVD™ is a direct Control Software and Automation replacement for Emcore, Veeco and Thomas Swan MOCVD systems and offers the latest in control technology, setting a new bar for MOCVD control flexibility. It was developed in response to demand for upgrading legacy MOCVD tools for state of the art processing and extends the life of proven MOCVD platforms no longer supported by the OEM. Visit our Gen 3 Imperium-MOCVD™ Control Software and Automation page to view current information, as we offer a brochure and data sheet for customer review. Contact us today to setup an online live Imperium demo.

We at Agnitron Technology, Inc. specialize in developing emerging compound semiconductor material and device technologies into commercial products as well as economical custom MOCVD equipment solutions. Our diverse team and partners draw from backgrounds in physics, materials science, semiconductor processing and electrical and mechanical engineering. Collectively, this team is credited with more than 400 published manuscripts and over 50 patents. Visit for more information.

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