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Traces from Imperium Insitu screen show temperature and thin film reflectance of two different substrates during MOCVD growth run.

Imperium-MOCVD is offered with a number of optional modules to allow customers to select important features and maximize value if some features are not important to their operation. Following is a description of the basic application features and the various optional modules.

Imperium-MOCVD Base Configuration Features

  • Real-time status of all valves, flows and pressures via GSD tabs
  • Easily configurable and editable recipes with nested layer looping capabilities
  • User configurable alarms
  • Static preconfigured hardware operation routines
  • Closed loop temperature control via thermocouple; data monitoring for other insitu metrology
  • Real-time and historical data plotting and logging
  • System event logging
  • System alarm dispositioning and notifications
  • System view of automated transfer operations
  • Complete Imperium configuration by Agnitron Engineers, onsite installation, remote and onsite Imperium user training
  • Industrial grade rack mount Windows 7 based control computer, monitor, mouse keyboard
  • 12 month warranty, support and maintenance services
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The Imperium-MOCVD™ base configuration is everything needed to transition legacy MOCVD systems to a modern, supported and highly capable Windows based control platform.  This base configuration provides all the safety and standard features of more sophisticated Imperium configurations but at an economical price point.

 

Optional Imperium Feature Modules:

Following Imperium-MOCVD modules can be selected al a carte to deliver the right features for meeting your operational requirements. Click on feature name to open more information.

The Insitu control screen displays real-time temperature data and is shown in the screenshot above.

The Insitu control screen displays real-time temperature data and is shown in the screenshot above.

Imperium offers closed-loop feedback control of temperature during recipe execution using emissivity corrected or non-emissivity corrected pyrometers. Use of this feature with an emissivity corrected pyrometer enables maximum temperature stability and reproducibility and is suitable for high performance production and R&D processes. Imperium is currently capable of offering this capability with insitu metrology products from kSA, Veeco and LayTec.

Laptop-Imperium Recipe EditorA recipe editing package is available to allow users to build and edit recipes without directly accessing the MOCVD control computer. The ability to edit recipes while at an office or other remote work station is an added convenience for tool owners and allows production tools to run uninterrupted while recipe editing is required. Furthermore, the station can be used for analysis and plotting of past run data. Recipe files must be manually transferred between the recipe editing station and the Imperium control computer. Special configuration checks on the control and editor computers prevent mixing up of recipes from different system configurations. The station can be offered with an Agnitron supplied computer or can be loaded on a user’s existing Windows OS based computer.

Imperium - piezoconMO flow monitoring offers a critical capability for maximizing MOCVD process repeatability. Imperium analyzes precursor molar flow data from MO flow monitors in real time and adjusts carrier gas flow to compensate for small system fluctuations which cause changes in MO vapor pressure. This enables highly stable MO precursor molar flow delivery to the growth chamber; a critical capability for high performance production and R&D processes.

Remote system notifications allow users to be notified in real-time of various system system events such as alarms or recipe completion. Notifications can be distributed to email inboxes or via SMS messages to mobile phones – internet connectivity is required. Various security protocols can be implemented to comply with IT restrictions as needed.

Many users upgrading to Imperium are doing so from the no longer supported EpiView control platform. In cases where many recipes already existing Agnitron offers an EpiView recipe importing module to streamline conversion of EpiView recipes to the Imperium binary format, manual recipe verification is required after the automatic format
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The Device Editor module enables users with Administrative privileges to add new devices and incorporate them into the graphical user interface and configure the device control parameters. After the device is interconnected and configured in Imperium then it can be incorporated into recipes and alarms. Additionally, using the Dynamic System Routines module, the device can be incorporated into system routines. This capability is ideal for users that desire the ability to make gas panel modifications such as adding MFCs or PCUs.

This module gives users tremendous flexibility to adjust routines pre-configured to meet changing needs or to optimize cycle time. Additionally, if new devices, such as MFCs or PCUs, are added to the system, these devices can be incorporated into system routines. Furthermore, if a tool owner wishes to change a step in an existing routine such as adjusting the duration of a pause or the pressure of a purge step this can be done with the Dynamic System Routines module. Using this module routines are edited by users with Administrative privileges via a simple graphical user interface with familiar Windows style menu options.

Coming in 2016! The database analysis tool is a stand-alone sibling application of Imperium. All Imperium process, control and maintenance data is continuously written to a system database on the Imperium control computer. The Database Analysis Tool allows users to pull reports from the database for troubleshooting, maintenance prediction, process analysis and general operational or process optimization. Furthermore, this tool can interface with existing customer MES systems to offer exceptional production wide insights and awareness. This is an advanced module designed for high efficiency production operations.

Coming in 2016! The maintenance tracking module is a powerful production focused set of features that give maintenance staff tools for tracking maintenance events and tool usage along with the ability to set flags based on system events and usage to predict failures and identify windows for upcoming preventive maintenance events.