Configuration:

Emcore D180 MOCVD system Configured for GaN process:
MO sources are: 2-TMAl, 2-TMGa, 2-Cp2Mg, 1-TEGa, 2-TMIn.

Hydride sources: NH3, H2, N2, Si2H6

Comments:

The systems is fully operational, refurbished and upgraded with new hardware and IMPERIUM–MOCVD Software. Inspection can be arranged. We provide installation, support and warranty.

Go back to the full list of used / refurbished MOCVD systems

Manufacturer: VEECO / EMCORE
Model No: D180 (GaN) MOCVD
Model Year: 2001
Equip Type: LED Wafer Fabrication
Category: Chemical Vapor Deposition (CVD)
Item ID: AGTI-D180GAN015
Quantity: Several
Condition: Good/Excellent
Status: Available
Serial No: Available upon request
Availability: Immediate
Price (USD): Please request quote
Location: Eden Prairie, MN