Agnitron has received an order from a California-based company to supply an MOCVD system for growth of communication laser-diode structures. The small production-scale MOCVD system will offer 6×2” wafer loading with a high-speed rotating vertical reactor configuration. Included with the equipment configuration is a custom gas mixing panel with 11 MO sources and advanced pressure balanced flow mixing manifolds.
This system, along with all other MOCVD systems shipped by Agnitron, will ship standard with state-of-art Imperium-MOCVD control software. Additionally, Agnitron will supply an Emissivity Corrected Pyrometer, Piezocon MO flow monitors, gas abatement system, and an Imperium-MOCVD Recipe Editor Station. Upon delivery of the package to the customer facility Agnitron will be offering field services to startup the system, offer onsite customer operation and maintenance training and providing a material growth demonstration according to the customer’s material specification.
The Imperium platform is a Windows 7 based package and is used for controlling MOCVD and other semiconductor process equipment. Imperium-MOCVD™ is a direct Control Software replacement for Emcore, Veeco and Thomas Swan MOCVD systems and offers the latest in control technology, setting a new bar for MOCVD control flexibility. It was developed in response to demand for upgrading legacy MOCVD tools for state of the art processing and extends the life of proven MOCVD platforms no longer supported by the OEM. Visit our Gen 3 Imperium-MOCVD™ control software page to view current information, as we offer a brochure and data sheet for customer inspection. Contact us today to setup an online live Imperium demo.
Agnitron Technology, Inc. specializes in supplying custom and small production-scale MOCVD and CVD equipment solutions for nanotechnology, compound semiconductor and related advanced material growth programs. Our diverse team and partners draw from backgrounds in physics, materials science, semiconductor processing and electrical and mechanical engineering. Collectively, this team is credited with more than 400 published manuscripts and over 50 patents. Visit www.agnitron.com for more information.